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Accelerated surface measurement using wavelength scanning interferometer with compensation of environmental noise

Muhamedsalih, Hussam, Jiang, Xiang and Gao, F. (2012) Accelerated surface measurement using wavelength scanning interferometer with compensation of environmental noise. Procedia Engineering: 12th CIRP Conference on Computer Aided Tolerancing. ISSN 1877-7058 (In Press)

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    The optical interferometry has been widely explored for surface measurement due to the advantages of non-contact
    and high accuracy interrogation. Eventually, some interferometers are used to measure both rough and smooth
    surfaces such as white light interferometer and wavelength scanning interferometer (WSI). The WSI can measure
    large discontinuous surface profiles without the phase ambiguity problems. However, the WSI usually needs to
    capture hundreds of interferograms at different wavelength in order to evaluate the surface finish for a sample.
    Moreover, the measurement process might be affected by environmental disturbances if the surface inspection takes
    place in a production environment (e.g. in- process inspection). This paper introduces a wavelength scanning
    interferometer (WSI) for fast areal surface measurement of micro and nano-scale surfaces which is immune to
    environmental noise. The WSI system and operation principles are introduced in this paper. Mathematical description
    of data analysis is presented. This paper also describes an active servo control system that serves as a phase
    compensating mechanism to eliminate the effects of environmental noise. Finally, a parallel programming model is
    presented as a solution to accelerate the computing analysis in the WSI. This parallel programming is based on
    CUDATM C program structure that developed by NVIDIA. The presented system can be used for on-line or inprocess
    measurement on the shop floor.

    Item Type: Article
    UNSPECIFIEDMuhamedsalih, H
    Subjects: Q Science > QC Physics
    T Technology > TJ Mechanical engineering and machinery
    T Technology > TS Manufactures
    Schools: School of Computing and Engineering
    Related URLs:
    Depositing User: Feng Gao
    Date Deposited: 11 Oct 2012 14:34
    Last Modified: 11 Oct 2012 14:34


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