Measurement of structured surface using stylus, AFM and optical methods
Gao, F., Petzing, J, Coupland, J. M. and Leach, Richard K.
(2007)
Measurement of structured surface using stylus, AFM and optical methods.
In:
Metrology and properties of engineering surfaces: proceedings of the 11th international conference, Huddersfield, on 17th-20th July 2007.
University of Huddersfield, Huddersfield, UK, p. 363.
ISBN 1862180571