Measurement and characterisation of micro nano-scale structured surfaces

Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao (2009) Measurement and characterisation of micro nano-scale structured surfaces. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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Abstract

This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures.

Information

URI:

https://eprints.hud.ac.uk/id/eprint/5219

Title:

Measurement and characterisation of micro nano-scale structured surfaces

Creators:

Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao

Official URL:

http://www2.hud.ac.uk/researchfestival/poster_comp...

Date:

March 2009

Subjects: