A Chip Device For On-line Assessment In Nano-scale Surface Manufacture

Yang, Shuming

A Chip Device For On-line Assessment In Nano-scale Surface Manufacture

Yang, Shuming (2009) A Chip Device For On-line Assessment In Nano-scale Surface Manufacture. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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Abstract

This project aims to create a novel system based on interferometry and
wavelength spatial scanning techniques using breakthrough micro-/nanotechnology
and optical methodologies. The system will be used for online
nano-scale surface measurement, which represents an important step
change in the fields of surface metrology.

Information

URI:

https://eprints.hud.ac.uk/id/eprint/5204

Title:

A Chip Device For On-line Assessment In Nano-scale Surface Manufacture

Creators:

Yang, Shuming

Official URL:

http://www2.hud.ac.uk/researchfestival/poster_comp...

Date:

March 2009

Subjects: