Abstract
This project aims to create a novel system based on interferometry and
wavelength spatial scanning techniques using breakthrough micro-/nanotechnology
and optical methodologies. The system will be used for online
nano-scale surface measurement, which represents an important step
change in the fields of surface metrology.
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A_Chip_Device_For_On-line_Assessment_In_Nano-scale_Surface_Manufacture_-_Shuming_Yang.pdf
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CORE (COnnecting REpositories)
CORE (COnnecting REpositories)
