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A Chip Device For On-line Assessment In Nano-scale Surface Manufacture

Yang, Shuming (2009) A Chip Device For On-line Assessment In Nano-scale Surface Manufacture. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
Abstract

This project aims to create a novel system based on interferometry and
wavelength spatial scanning techniques using breakthrough micro-/nanotechnology
and optical methodologies. The system will be used for online
nano-scale surface measurement, which represents an important step
change in the fields of surface metrology.

Library
Item Type:
Conference or Workshop Item
Presentation Type:
Poster
Depositing User:
Cherry Edmunds
Date Deposited:
22 Jul 2009 07:53
Revision:
395
Last Modified:
28 Aug 2021 22:48
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