Yang, Shuming (2009) A Chip Device For On-line Assessment In Nano-scale Surface Manufacture. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
Abstract

This project aims to create a novel system based on interferometry and
wavelength spatial scanning techniques using breakthrough micro-/nanotechnology
and optical methodologies. The system will be used for online
nano-scale surface measurement, which represents an important step
change in the fields of surface metrology.

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