The Design and Use of F1 Softgauges for Validating Surface Metrology Software

This paper presents a methodology for validating surface metrology software. Based
uncertainty analysis, a set of reference data sets with mathematical correct results, call the type F1
softgauges, have been developed. Special designed profiles can be used to check specification
uncertainty and algebra calculation is used to lower method uncertainty. The results shown that
specification uncertainties were main uncertainty contributors.