Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si3N4, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM.