Fabrication of microfluidic injection moulds by a hybrid micromachining process

In this paper a hybrid micromachining approach was developed for the fabrication of microfluidic injection moulds. A micro injection mould with 500μm wide and 200μm high channels was machined by high-speed micromilling. The microchannels inside the mould were then processed by a Nd:YAG laser to remove the burrs generated in the micromilling process. The measurement results confirmed the effectiveness of this hybrid micromachining process in obtaining high-quality microproducts.