Development of “softgauges” for surface profile metrology
Blunt, Liam, Leach, Richard K., Scott, Paul J., Harris, Peter M., Xiao, Shaojun, Li, T., Parkin, G. and Jiang, Xiang
(2005)
Development of “softgauges” for surface profile metrology.
In: 5th Euspen International Conference, 9th-12th May 2005, Montpellier, France.
(Unpublished)