Measurement and characterisation of micro nano-scale structured surfaces

Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao (2009) Measurement and characterisation of micro nano-scale structured surfaces. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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Abstract

This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures.

Item Type:	Conference or Workshop Item (Poster)
Subjects:	T Technology > T Technology (General)
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Depositing User:	Cherry Edmunds
Date Deposited:	22 Jul 2009 09:48
Last Modified:	30 Mar 2018 10:30
URI:	http://eprints.hud.ac.uk/id/eprint/5219

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