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Measurement and characterisation of micro nano-scale structured surfaces

Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao (2009) Measurement and characterisation of micro nano-scale structured surfaces. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
Abstract

This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures.

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Item Type:
Conference or Workshop Item
Presentation Type:
Poster
Depositing User:
Cherry Edmunds
Date Deposited:
22 Jul 2009 09:48
Revision:
435
Last Modified:
21 Dec 2024 11:01
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