Chen, Xiaomei and Koenders, Ludger (2013) A novel pitch evaluation method based on a cross-correlation filter. In: Nanoscale 2013, 25-26, April 2013, Paris, France. (Unpublished)
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Abstract
A cross correlation filter ̶ a half period of sinusoidal waveform sequence (pT period), is applied to filter the topographical signal (p period )of 1D arbitrary-form grating against positions. It, as a template, cross-correlate with the signal and the noise that coexists with signal is eliminated if pT p. After filtering, the distance between any two adjacent waveform peaks along the direction perpendicular to 1D grating lines is one pitch value, the peak-detection (PD) method. In this method, the pitch average and uniformity can be calculated
Item Type: | Conference or Workshop Item (Poster) | ||||||||||||
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Subjects: | Q Science > QC Physics T Technology > TS Manufactures |
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Schools: | School of Computing and Engineering | ||||||||||||
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Depositing User: | Xiaomei Chen | ||||||||||||
Date Deposited: | 02 May 2013 09:14 | ||||||||||||
Last Modified: | 28 Aug 2021 20:01 | ||||||||||||
URI: | http://eprints.hud.ac.uk/id/eprint/17340 |
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