A novel pitch evaluation method based on a cross-correlation filter

Chen, Xiaomei and Koenders, Ludger (2013) A novel pitch evaluation method based on a cross-correlation filter. In: Nanoscale 2013, 25-26, April 2013, Paris, France. (Unpublished)

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Abstract

A cross correlation filter ̶ a half period of sinusoidal waveform sequence (pT period), is applied to filter the topographical signal (p period )of 1D arbitrary-form grating against positions. It, as a template, cross-correlate with the signal and the noise that coexists with signal is eliminated if pT  p. After filtering, the distance between any two adjacent waveform peaks along the direction perpendicular to 1D grating lines is one pitch value, the peak-detection (PD) method. In this method, the pitch average and uniformity can be calculated

Item Type:	Conference or Workshop Item (Poster)
Contributors:	Contribution Name Email ORCID Author Chen, Xiaomei x.chen2@hud.ac.uk UNSPECIFIED Author Koenders, Ludger ludger.koenders@ptb.de UNSPECIFIED
Subjects:	Q Science > QC Physics T Technology > TS Manufactures
Schools:	School of Computing and Engineering
Related URLs:	Author
Depositing User:	Xiaomei Chen
Date Deposited:	02 May 2013 09:14
Last Modified:	28 Mar 2018 18:46
URI:	http://eprints.hud.ac.uk/id/eprint/17340

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