A Laser Heterodyne Interferometer for Measuring Nanometer Displacement

Xu, Y., Ye, X., Xu, J., Li, C. and Gao, F. (1989) A Laser Heterodyne Interferometer for Measuring Nanometer Displacement. In: 2nd IMEKO TC14 International Symposium on Metrology for Quality Control in Production, 1989, Beijing, China.

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URI:

https://eprints.hud.ac.uk/id/eprint/8001

URI:

https://eprints.hud.ac.uk/id/eprint/8001

Title:

A Laser Heterodyne Interferometer for Measuring Nanometer Displacement

Creators:

Xu, Y., Ye, X., Xu, J., Li, C. and Gao, F.

Date:

January 1989

Subjects:

Q Science > QC Physics

Schools:

School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group

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Item Type:

Conference or Workshop Item

Presentation Type:

Paper

Depositing User:

Feng Gao

Date Deposited:

06 Jul 2010 15:21

Revision:

Last Modified:

28 Aug 2021 10:57

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