Limitations and Innovations in Scanning White Light Interferometry

Lobera, L, Gao, F., Petzing, J and Coupland, J. M. (2008) Limitations and Innovations in Scanning White Light Interferometry. In: euspen 10th Anniversary International Conference, 18-22 May 2008, Zurich, Switzerland,.

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URI:

https://eprints.hud.ac.uk/id/eprint/7974

Title:

Limitations and Innovations in Scanning White Light Interferometry

Creators:

Lobera, L, Gao, F., Petzing, J and Coupland, J. M.

Official URL:

http://www.euspen.eu/displayevent.asp?eventid=12

Date:

18 May 2008

Subjects:

Q Science > QC Physics

Schools:

School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group

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Item Type:

Conference or Workshop Item

Presentation Type:

Speech

Depositing User:

Feng Gao

Date Deposited:

05 Jul 2010 14:16

Revision:

Last Modified:

28 Aug 2021 10:57

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