Abstract
Interferometer is one of the methods that are used for measuring surface profile with high accuracy reach to the order of 1/1000 of the wavelength of the light. The accuracy in a given interferomter depends on many factors such as the light source properties and environmental mechanical vibration. This poster illustrates a method to increase the accuracy of Linnik interferometer for nano-scale measurements.
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Surface_Profile_Height_Measurement_Using_Optical_Interferometry_Method_-_Hussam_Muhamedsalih.pdf
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