Light-beam scanning interferometry for on-line ultra precision surface measurement

Wang, Kaiwei, Jiang, Xiang, Martin, Haydn and Blunt, Liam (2007) Light-beam scanning interferometry for on-line ultra precision surface measurement. In: 7th International Conference of the European Society for Precision Engineering and Nanotechnology 2007. Proceedings. Euspen, Bedford, pp. 302-305. ISBN 978-0-9553082-2-2

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https://eprints.hud.ac.uk/id/eprint/4046

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https://eprints.hud.ac.uk/id/eprint/4046

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https://eprints.hud.ac.uk/id/eprint/4046

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https://eprints.hud.ac.uk/id/eprint/4046

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https://eprints.hud.ac.uk/id/eprint/4046

URI:

https://eprints.hud.ac.uk/id/eprint/4046

URI:

https://eprints.hud.ac.uk/id/eprint/4046

URI:

https://eprints.hud.ac.uk/id/eprint/4046

URI:

https://eprints.hud.ac.uk/id/eprint/4046

URI:

https://eprints.hud.ac.uk/id/eprint/4046

URI:

https://eprints.hud.ac.uk/id/eprint/4046

Title:

Light-beam scanning interferometry for on-line ultra precision surface measurement

Creators:

Wang, Kaiwei, Jiang, Xiang, Martin, Haydn and Blunt, Liam

Editors:

Thornett, E.

Date:

May 2007

Subjects:

T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)

Schools:

School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group

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Book Chapter

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Date Deposited:

24 Apr 2009 14:36

Revision:

13

Last Modified:

28 Aug 2021 10:46

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