Tonnellier, X., Morantz, P., Shore, P., Baldwin, A., Evans, R. and Walker, D.D. (2007) Subsurface damage in precision ground ULE (R) and Zerodur (R) surfaces. Optics Express, 15 (19). pp. 12197-12205. ISSN 1094-4087
Abstract

The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamics’ related.

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