Kovacicinova, Jana, Zhang, Peng, Li, Jie, Yu, Guoyu and Walker, David D. (2016) Development of swinging part profilometer for optics. Proceedings of SPIE, 10151. 101510B. ISSN 0277-786X
Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

Information
Library
Documents
[img]
Preview
101510B.pdf - Published Version

Download (1MB) | Preview
Statistics

Downloads

Downloads per month over past year

Add to AnyAdd to TwitterAdd to FacebookAdd to LinkedinAdd to PinterestAdd to Email