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Near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement

Jiang, Xiang, Wang, Kaiwei and Martin, Haydn (2006) Near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement. Optical Letters, 31. pp. 3603-3605. ISSN 0146-9592
Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
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https://eprints.hud.ac.uk/id/eprint/279
URI:
https://eprints.hud.ac.uk/id/eprint/279
URI:
https://eprints.hud.ac.uk/id/eprint/279
URI:
https://eprints.hud.ac.uk/id/eprint/279
Title:
Near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement
Creators:
Jiang, Xiang, Wang, Kaiwei and Martin, Haydn
Identification Number:
10.1364/OL.31.003603
Official URL:
http://dx.doi.org/10.1364/OL.31.003603
Date:
2006
Subjects:
T Technology > TS Manufactures
Schools:
School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Additional Information:
UoA 25 (General Engineering) Published in Optical Letters © 2006 Optical Society of America
Library
Item Type:
Article
Depositing User:
Briony Heyhoe
Date Deposited:
18 Jul 2007
Revision:
20
Last Modified:
28 Aug 2021 23:33
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