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Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation
Blunt, Liam
(2006)
Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation.
In: Micro and Nano Technology (MNT) Measurement Club, 1-day meeting, The Measurement and Characterisation of MST Devices (MEMS), Monday 27 February 2006, National Physical Laboratory, Hampton Road, Teddington, Middlesex TW11 0LW.
(Unpublished)
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