Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation

Blunt, Liam (2006) Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation. In: Micro and Nano Technology (MNT) Measurement Club, 1-day meeting, The Measurement and Characterisation of MST Devices (MEMS), Monday 27 February 2006, National Physical Laboratory, Hampton Road, Teddington, Middlesex TW11 0LW. (Unpublished)

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URI:

https://eprints.hud.ac.uk/id/eprint/2751

URI:

https://eprints.hud.ac.uk/id/eprint/2751

URI:

https://eprints.hud.ac.uk/id/eprint/2751

URI:

https://eprints.hud.ac.uk/id/eprint/2751

Title:

Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation

Creators:

Blunt, Liam

Date:

27 February 2006

Subjects:

T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)

Schools:

School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group

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Item Type:

Conference or Workshop Item

Presentation Type:

Other

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Date Deposited:

24 Nov 2008 16:12

Revision:

13

Last Modified:

28 Aug 2021 10:43

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