Abstract
  The wavelength scanning interferometer is currently being applied as a core metrology technology as part of the EU project NanoMend - Nanoscale Defect Detection, Cleaning and Repair for Large Area Substrates ̴500 mm width.
NanoMend Project aims to develop technologies that are able to detect and correct micro and nano-scale defects in roll-to-roll produced films in order to improve product performance, yield and lifetime.
Information
  
Library
  Documents
  Statistics
  Downloads
Downloads per month over past year


 CORE (COnnecting REpositories)
 CORE (COnnecting REpositories)