Elrawemi, Mohamed, Blunt, Liam, Fleming, Leigh and Muhamedsalih, Hussam (2014) Wavelength Scanning Interferometery for large area roll to roll metrology applications in photovoltaic manufacturing environment. In: 10th LVMC Large Volume Metrology Conference and Exhibition, 18th -20th November 2014, The Mercure Manchester Piccadilly, UK.
Abstract

The wavelength scanning interferometer is currently being applied as a core metrology technology as part of the EU project NanoMend - Nanoscale Defect Detection, Cleaning and Repair for Large Area Substrates ̴500 mm width.
NanoMend Project aims to develop technologies that are able to detect and correct micro and nano-scale defects in roll-to-roll produced films in order to improve product performance, yield and lifetime.

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