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On-line surface inspection using cylindrical lens-based spectral domain low-coherence interferometry

Tang, Dawei, Gao, Feng and Jiang, Xiangqian (2014) On-line surface inspection using cylindrical lens-based spectral domain low-coherence interferometry. Applied Optics, 53 (24). pp. 5510-5516. ISSN 1559-128X

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We present a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques by using cylindrical lenses as the objective lens in a Michelson interferometric configuration to enable the measurement of long profiles. Combined with a modern high speed CCD camera, general-purpose graphics processing unit (GPGPU) and multi-core processors computing technology, fast measurement can be achieved. By translating the tested sample during the measurement procedure, real-time surface inspection was implemented, which is proved by the large-scale 3D surface measurement in this paper. ZEMAX software is used to simulate the SD-LCI system and analyse the alignment errors. Two step height surfaces were measured and the captured interferograms were analyzed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.

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Item Type: Article
Additional Information: This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Uncontrolled Keywords: Spectrum analysis; Interferometry; Metrology; Optical inspection
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TS Manufactures
Schools: School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
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Depositing User: Dawei Tang
Date Deposited: 10 Nov 2014 11:21
Last Modified: 06 Apr 2018 17:02


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