Martin, Haydn, Kumar, Prashant and Jiang, Xiangqian (2014) A hybrid photonics based sensor for surface measurement. CIRP Annals - Manufacturing Technology, 63 (1). pp. 549-552. ISSN 0007-8506
Abstract

By integrating photonic devices on a silicon wafer containing etched waveguides it is possible to create a complete optical system-on-chip. Such a device can contain all the elements required for implementing a wide range of interferometry techniques including wavelength scanning and phase shifting. In this paper we introduce a hybrid photonics based sensor for surface metrology applications containing the following ‘on-chip’ components: tunable laser, phase-shifter, wavelength de-multiplexer, and wavelength encoder. This paper presents the design of the system-on-chip as a miniaturised sensor. Initial experimental results are shown which prove the potential of this device as a viable surface measurement tool.

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