Chen, Xiaomei, Cao, Hang, Zhou, Zili and Qi, Aihui (1998) Design of a Laser Heterodyne Interferometer for 2-D Nanometer Scale Measurement. Optoelectronic Engineering, 25 (1). pp. 18-22. ISSN 1003-501X

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Abstract

The design of a 2-D laser heterody ne interferometer w ith 2nm uncertainty
and 0. 5nm r esolutio n w ithin 50Lm measuring range is proposed in the paper. The acousto-optic modulator and frequency-stabilizing He-Ne laser will be used to obtain an orthogonal polarized frequency laser beam with less than 200 kHz frequency difference. Both polarization interfero-meters at X and Y axes are differential interferometer. Phase demodulation technology will be used for heterodyne interference signal processing.

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