Bernardini, S., MacKenzie, M., Buiu, O., Bailey, Paul, Noakes, T.C.Q., Davey, W.M., Hamilton, B. and Hall, S. (2008) Chemical and optical profiling of ultra thin high-k dielectrics on silicon. Thin Solid Films, 517 (1). pp. 459-461. ISSN 0040-6090

The thickness of HfO2 and hafnium silicate HfxSi1 − xOy thin films with a range of compositions are investigated using three complementary analytical techniques. We compare results obtained from Medium Energy Ion Scattering spectroscopy, spectroellipsometry and high-resolution Transmission Electron Microscopy. Our results demonstrate that the thickness of the silicate layers decreases with the Hf content