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A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions
Parisini, Andrea, Morandi, Vittorio, Van den Berg, Jakob, Reading, Michael A., Giubertoni, Damiano, Bailey, Paul and Noakes, T. C. Q.
(2009)
A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions.
In: MRS 2009 Fall Meeting, 30th November - 4th December 2011, Boston.
(Unpublished)
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