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A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions

Parisini, Andrea, Morandi, Vittorio, Van den Berg, Jakob, Reading, Michael A., Giubertoni, Damiano, Bailey, Paul and Noakes, T. C. Q. (2009) A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions. In: MRS 2009 Fall Meeting, 30th November - 4th December 2011, Boston. (Unpublished)
Information
URI:
https://eprints.hud.ac.uk/id/eprint/12274
URI:
https://eprints.hud.ac.uk/id/eprint/12274
URI:
https://eprints.hud.ac.uk/id/eprint/12274
URI:
https://eprints.hud.ac.uk/id/eprint/12274
URI:
https://eprints.hud.ac.uk/id/eprint/12274
URI:
https://eprints.hud.ac.uk/id/eprint/12274
Title:
A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions
Creators:
Parisini, Andrea, Morandi, Vittorio, Van den Berg, Jakob, Reading, Michael A., Giubertoni, Damiano, Bailey, Paul and Noakes, T. C. Q.
Date:
December 2009
Subjects:
Q Science > QC Physics
Schools:
School of Applied Sciences
Library
Item Type:
Conference or Workshop Item
Presentation Type:
Paper
Depositing User:
Sharon Beastall
Date Deposited:
03 Jan 2012 13:20
Revision:
13
Last Modified:
28 Aug 2021 11:12
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