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The use of interferometry and image analysis techniques for metrology of MST devices

Blunt, Liam, Jiang, Xiang, Xiao, Shaojun and Scott, Paul J. (2004) The use of interferometry and image analysis techniques for metrology of MST devices. In: 8th International Symposium on Measurement and Quality Control in Production, 12th-15th October, 2004, Erlangen, Germany. (Unpublished)
Information
URI:
https://eprints.hud.ac.uk/id/eprint/1144
Title:
The use of interferometry and image analysis techniques for metrology of MST devices
Creators:
Blunt, Liam, Jiang, Xiang, Xiao, Shaojun and Scott, Paul J.
Date:
14 October 2004
Subjects:
T Technology > T Technology (General)
T Technology > TS Manufactures
Schools:
School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Library
Item Type:
Conference or Workshop Item
Presentation Type:
Paper
Depositing User:
Briony Heyhoe
Date Deposited:
21 Jul 2008 13:16
Revision:
17
Last Modified:
28 Aug 2021 10:39
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