Building a Flexible Surface Characterisation System Architecture

Surface characterisation system needs to be updated constantly with the emergence of new
algorithms and methods in the field of surface metrology. As function modules in current surface
characterisation system are tightly coupled together, it is not conducive to the reuse of function modules and innovation of overall system. A lot of redundant and duplicate works have been done in present characterisation systems, and they will be done again when building a new characterisation system. In order to improve the reusability of function modules and facilitate system extension, this paper presents a flexible architecture for such surface characterisation systems by employing component based development technologies. Function components will be separated from system
framework and implemented independently, so that the overall system is constructed by gluing these
function components together.