Calibration of transfer standards for SPM

Gao, F., Peng, G. and Koenders, L. (1998) Calibration of transfer standards for SPM. Microelectronic Engineering, 41 (42). pp. 615-618. ISSN 0167-9317

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Abstract

A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.

Item Type:	Article
Subjects:	Q Science > QC Physics
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:	Author
Depositing User:	Feng Gao
Date Deposited:	06 Jul 2010 13:13
Last Modified:	02 Dec 2010 13:37
URI:	http://eprints.hud.ac.uk/id/eprint/7990

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