Limitations and Innovations in Scanning White Light Interferometry

Lobera, L, Gao, F., Petzing, J and Coupland, J. M. (2008) Limitations and Innovations in Scanning White Light Interferometry. In: euspen 10th Anniversary International Conference, 18-22 May 2008, Zurich, Switzerland,.

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Item Type:	Conference or Workshop Item (Speech)
Subjects:	Q Science > QC Physics
Schools:	School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:	Author Conference
Depositing User:	Feng Gao
Date Deposited:	05 Jul 2010 14:16
Last Modified:	02 Dec 2010 13:29
URI:	http://eprints.hud.ac.uk/id/eprint/7974

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