Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise

Jiang, Xiang, Wang, Kaiwei, Gao, F. and Muhamedsalih, Hussam (2010) Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. Applied Optics, 49 (15). pp. 2903-2909. ISSN 1559-128X

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Abstract

We introduce a new optical interferometry system for fast areal surface measurement of microscale
and nanoscale surfaces that are immune to environmental noise. Wavelength scanning interferometry
together with an acousto-optic tunable filtering technique is used to measure surfaces with large
step heights. An active servo control system serves as a phase-compensating mechanism to eliminate
the effects of environmental noise. The system can be used for online or in-process measurement on
a shop floor. Measurement results from two step height standard samples and a structured surface
of a semiconductor daughterboard are presented. In comparison with standard step height specimens,
the system achieved nanometer measurement accuracy. The measurement results of the semiconductor daughterboard, under mechanical disturbance, showed that the system can withstand environmental
noise.

Item Type:	Article
Additional Information:	This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-49-15-2903 Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Subjects:	T Technology > TJ Mechanical engineering and machinery Q Science > QC Physics
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:	Author Author Publisher
Depositing User:	Feng Gao
Date Deposited:	19 May 2010 16:20
Last Modified:	29 Mar 2018 18:01
URI:	http://eprints.hud.ac.uk/id/eprint/7718

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