Surface Profile Height Measurement Using Optical Interferometry Method

Muhamedsalih, Hussam, Jiang, Xiang and Wang, Kaiwei (2009) Surface Profile Height Measurement Using Optical Interferometry Method. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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Abstract

Interferometer is one of the methods that are used for measuring surface profile with high accuracy reach to the order of 1/1000 of the wavelength of the light. The accuracy in a given interferomter depends on many factors such as the light source properties and environmental mechanical vibration. This poster illustrates a method to increase the accuracy of Linnik interferometer for nano-scale measurements.

Item Type:	Conference or Workshop Item (Poster)
Subjects:	T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General)
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Depositing User:	Cherry Edmunds
Date Deposited:	22 Jul 2009 11:44
Last Modified:	06 Dec 2016 06:25
URI:	http://eprints.hud.ac.uk/id/eprint/5236

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