A self stabilising multiplexed interferometer for on-line surface measurement

This paper introduces a new surface measurement method for potential online surface measurement
application. It features high stability due to using near common-path configuration combined with
active stabilisation. The active stabilisation is supplied by the use of a multiplexed reference
interferometer and piezo-electric translator mounted mirror. The active compensation makes the
system resistant to disturbance, pointing toward the possibility of on line use. The method should be of
great benefit to advanced manufacturing, especially for quality and process control in precision
manufacturing and on the production line. Proof-of-concept experiments have been successfully
conducted by measuring the system stability over time.