Vibration compensating beam scanning interferometer for surface measurement

Jiang, Xiang, Martin, Haydn and Wang, Kaiwei (2007) Vibration compensating beam scanning interferometer for surface measurement. In: Proceedings of Computing and Engineering Annual Researchers' Conference 2007: CEARC’07. University of Huddersfield, Huddersfield.

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Abstract

Light beam scanning using a dispersive element and wavelength tuning is coupled with fibre-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nano-scale surface structures and form deviation. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out due deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.

Item Type:	Book Chapter
Uncontrolled Keywords:	fibre interferometer vibration stabilised
Subjects:	T Technology > T Technology (General)
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Computing and Engineering Annual Researchers' Conference (CEARC) School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:	Author Author Conference
Depositing User:	Graham Stone
Date Deposited:	23 Mar 2009 13:44
Last Modified:	28 Aug 2021 23:14
URI:	http://eprints.hud.ac.uk/id/eprint/3697

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