Search:
Computing and Library Services - delivering an inspiring information environment

The application of parametric estimation techniques to wavelength scanning interferometry

Woodcock, Rebecca (2017) The application of parametric estimation techniques to wavelength scanning interferometry. Masters thesis, University of Huddersfield.

[img]
Preview
PDF - Accepted Version
Available under License Creative Commons Attribution Non-commercial No Derivatives.

Download (1MB) | Preview

Abstract

The growth in the manufacture of complex surfaces means that surface metrology has become an essential part of the manufacturing process in many industries. Wavelength scanning interferometry (WSI) is a technique that enables fast surface topography measurement. Since WSI can be implemented without the measurand or apparatus being mechanically moved, the measurement times are substantially less than other topography techniques that require mechanical movement. A variety of algorithms can be used to evaluate the spectral interferograms generated from WSI, and the choice of algorithm affects the axial (height) resolution and measurement range that can be attained. At present Fourier transform based methods are the most commonly used, but these can have a number of limitations, including problems which derive from short data lengths.

In order to extend the measurement range of the WSI, frequency estimation techniques based on an auto-regressive model are introduced. In particular, the Burg method is suggested as an alternative to current algorithms and a comparison is made to Fourier-transform methods using both simulated data and experimental data of a step-height sample measured using WSI.

Item Type: Thesis (Masters)
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
Depositing User: Rebecca Hill
Date Deposited: 10 Dec 2018 17:23
Last Modified: 07 Feb 2019 15:31
URI: http://eprints.hud.ac.uk/id/eprint/34725

Downloads

Downloads per month over past year

Repository Staff Only: item control page

View Item View Item

University of Huddersfield, Queensgate, Huddersfield, HD1 3DH Copyright and Disclaimer All rights reserved ©