Hassan, Mothana A., Martin, Haydn and Jiang, Xiangqian (2017) Development of a spatially dispersed short-coherence interferometry sensor using diffraction grating orders. Applied Optics, 56 (22). pp. 6391-6397. ISSN 1559-128X
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Abstract
Modern manufacturing processes can achieve good throughput by requiring that manufactured products be screened by better quality control exercised at a quicker rate. This trend in the quality control of manufactured products increases the need for process-oriented precision metrology capable of performing faster inspections and yielding valuable feedback to the manufacturing system. This paper presents a spatially dispersed short-coherence interferometry sensor using diffraction orders of the zeroth and first order for a diffraction grating introduced as a new compact system configuration for surface profile measurement. In this modified design, the diffraction grating acts as the beam splitter/combiner. Diffractions for the zeroth and first orders are represented by the reference and measurement arms, respectively, of a Michelson interferometer, which reduces the optical path length. This innovative design has been proven effective for determining the step-height repeatability in the sensor range from 27 nm to 22 nm for profiles spanning the step heights of the tested specimens.
Item Type: | Article |
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Subjects: | T Technology > T Technology (General) T Technology > TJ Mechanical engineering and machinery |
Schools: | School of Computing and Engineering |
Related URLs: | |
Depositing User: | Sally Hughes |
Date Deposited: | 06 Dec 2017 16:20 |
Last Modified: | 28 Aug 2021 15:23 |
URI: | http://eprints.hud.ac.uk/id/eprint/34062 |
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