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Development of a spatially dispersed short-coherence interferometry sensor using diffraction grating orders

Hassan, Mothana A., Martin, Haydn and Jiang, Xiangqian (2017) Development of a spatially dispersed short-coherence interferometry sensor using diffraction grating orders. Applied Optics, 56 (22). pp. 6391-6397. ISSN 1559-128X

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Abstract

Modern manufacturing processes can achieve good throughput by requiring that manufactured products be screened by better quality control exercised at a quicker rate. This trend in the quality control of manufactured products increases the need for process-oriented precision metrology capable of performing faster inspections and yielding valuable feedback to the manufacturing system. This paper presents a spatially dispersed short-coherence interferometry sensor using diffraction orders of the zeroth and first order for a diffraction grating introduced as a new compact system configuration for surface profile measurement. In this modified design, the diffraction grating acts as the beam splitter/combiner. Diffractions for the zeroth and first orders are represented by the reference and measurement arms, respectively, of a Michelson interferometer, which reduces the optical path length. This innovative design has been proven effective for determining the step-height repeatability in the sensor range from 27 nm to 22 nm for profiles spanning the step heights of the tested specimens.

Item Type: Article
Subjects: T Technology > T Technology (General)
T Technology > TJ Mechanical engineering and machinery
Schools: School of Computing and Engineering
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Depositing User: Sally Hughes
Date Deposited: 06 Dec 2017 16:20
Last Modified: 06 Dec 2017 16:25
URI: http://eprints.hud.ac.uk/id/eprint/34062

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