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A surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry

Zhang, Tao, Gao, Feng and Jiang, Xiangqian (2017) A surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry. Optics Express, 25 (20). pp. 24148-214156. ISSN 1094-4087

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Abstract

This paper proposes an approach to measure double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle and mathematical model is discussed and the measurement system is calibrated with a combination of standard step-height samples for both probes vertical calibrations and a
specially designed calibration artefact for building up the space coordinate relationship of the dual-probe measurement system. The topography of the specially designed artefact is acquired by combining the measurement results with white light scanning interferometer (WLSI) and scanning electron microscope (SEM) for reference. The relative location of the two probes is then determined with 3D registration algorithm. Experimental validation of the approach is provided and the results show that the method is able to measure double-sided near-right-angle structured surfaces with nanometer vertical resolution and micrometer lateral resolution.

Item Type: Article
Subjects: Q Science > Q Science (General)
Schools: School of Computing and Engineering
Related URLs:
Depositing User: Sharon Beastall
Date Deposited: 19 Sep 2017 12:26
Last Modified: 04 Oct 2017 14:10
URI: http://eprints.hud.ac.uk/id/eprint/33425

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