Interferometry for Online/In-Process Surface Inspection

Gao, Feng (2017) Interferometry for Online/In-Process Surface Inspection. In: Optical Interferometry. InTech, Rijeka, Croatia, pp. 41-60. ISBN 978-953-51-2955-4

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Abstract

Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.

Keywords: online/in-process measurement, surface measurement, environmental disturbance, vibration compensation, reference interferometer, common path

Item Type:	Book Chapter
Subjects:	Q Science > QC Physics T Technology > TS Manufactures
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies
Related URLs:	Author
Depositing User:	Feng Gao
Date Deposited:	02 Mar 2017 16:43
Last Modified:	28 Aug 2021 16:16
URI:	http://eprints.hud.ac.uk/id/eprint/31219

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