Yang, H.S. and Walker, D.D. (2002) Progress on development of prototype laser reference system for stylus profilometry of large optics. Proceedings of SPIE, 4411. pp. 161-170. ISSN 0277-786X
Metadata only available from this repository.Abstract
In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.
Item Type: | Article |
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Subjects: | T Technology > TS Manufactures |
Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies |
Related URLs: | |
Depositing User: | Catherine Parker |
Date Deposited: | 01 Dec 2016 13:21 |
Last Modified: | 28 Aug 2021 12:11 |
URI: | http://eprints.hud.ac.uk/id/eprint/30440 |
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