Progress on development of prototype laser reference system for stylus profilometry of large optics

Yang, H.S. and Walker, D.D. (2002) Progress on development of prototype laser reference system for stylus profilometry of large optics. Proceedings of SPIE, 4411. pp. 161-170. ISSN 0277-786X

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Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Item Type:	Article
Subjects:	T Technology > TS Manufactures
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies
Related URLs:	Author
Depositing User:	Catherine Parker
Date Deposited:	01 Dec 2016 13:21
Last Modified:	28 Aug 2021 12:11
URI:	http://eprints.hud.ac.uk/id/eprint/30440

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