Subsurface damage in precision ground ULE (R) and Zerodur (R) surfaces

Tonnellier, X., Morantz, P., Shore, P., Baldwin, A., Evans, R. and Walker, D.D. (2007) Subsurface damage in precision ground ULE (R) and Zerodur (R) surfaces. Optics Express, 15 (19). pp. 12197-12205. ISSN 1094-4087

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Abstract

The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamics’ related.

Item Type:	Article
Uncontrolled Keywords:	Science & Technology, Physical Sciences, Optics, OPTICS, TECHNOLOGY, GLASS
Subjects:	T Technology > TS Manufactures
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies
Related URLs:	Author
Depositing User:	Catherine Parker
Date Deposited:	01 Dec 2016 12:13
Last Modified:	31 Mar 2018 17:30
URI:	http://eprints.hud.ac.uk/id/eprint/30421

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