Tonnellier, X., Morantz, P., Shore, P., Baldwin, A., Evans, R. and Walker, D.D. (2007) Subsurface damage in precision ground ULE (R) and Zerodur (R) surfaces. Optics Express, 15 (19). pp. 12197-12205. ISSN 1094-4087
Metadata only available from this repository.Abstract
The total process cycle time for large ULE® and Zerodur® optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE® and Zerodur® surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamics’ related.
Item Type: | Article |
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Uncontrolled Keywords: | Science & Technology, Physical Sciences, Optics, OPTICS, TECHNOLOGY, GLASS |
Subjects: | T Technology > TS Manufactures |
Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies |
Related URLs: | |
Depositing User: | Catherine Parker |
Date Deposited: | 01 Dec 2016 12:13 |
Last Modified: | 28 Aug 2021 12:11 |
URI: | http://eprints.hud.ac.uk/id/eprint/30421 |
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