Implementing a grolishing process in Zeeko IRP machines

Yu, G., Walker, D.D. and Li, H. (2012) Implementing a grolishing process in Zeeko IRP machines. Applied Optics, 51 (27). pp. 6637-6640. ISSN 1559-128X

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Abstract

The removal of mid-spatial-frequency errors is a challenging issue in most subaperture polishing technologies. A novel "grolishing" technology has been developed to deal with grinding errors of spatial wavelengths from 1 to 50 mm with the help of power spectral density analysis and filter theory. This grolishing process was implemented on Zeeko's IRP polishing machine, on which all the subsequent polishing was performed. This has greatly reduced the process time. Although different abrasive have been used, the process is self-contained. The process parameters have been optimized to leave an edge upstand of peak-to-valley of 1 μm over a width of 40 mm.

Item Type:	Article
Subjects:	T Technology > TS Manufactures
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies
Related URLs:	Author
Depositing User:	Catherine Parker
Date Deposited:	29 Nov 2016 16:00
Last Modified:	28 Aug 2021 12:11
URI:	http://eprints.hud.ac.uk/id/eprint/30402

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