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Quantitative considerations in Medium Energy Ion Scattering

Van den Berg, J. A., Zalm, P. C., Bailey, P., Rossall, A. K. and Reading, M. A. (2016) Quantitative considerations in Medium Energy Ion Scattering. In: High Resolution Depth Profiling Conference (HRDP08), 7th-11th August 2016, Western University, London, Ontario, Canada. (Unpublished)

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Abstract

Due to its unique capability of providing near-quantitative compositional and layer structure information during depth profiling analysis, in favourable cases, with sub-nanometre resolution,medium energy ion scattering (MEIS) is becoming increasingly important to the characterisation of microelectronic device structures in which scaling laws have demanded the growth and doping of layers of nanometre thickness. Here we assess the quantitative accuracy in terms of both depth and concentration, that can be achieved in MEIS depth profiling.

Item Type: Conference or Workshop Item (Poster)
Subjects: Q Science > QC Physics
Schools: School of Computing and Engineering > International Institute for Accelerator Applications
School of Computing and Engineering
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Depositing User: Jakob Van Den Berg
Date Deposited: 10 Aug 2017 13:33
Last Modified: 10 Aug 2017 13:33
URI: http://eprints.hud.ac.uk/id/eprint/29643

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