Wang, Kaiwei and Zeng, L. (2005) Two-dimensional surface-profile imaging technique based on double-grating frequency shifter. Applied Optics, 44 (22). pp. 4625-4630. ISSN 0003-6935

A two-dimensional surface profile imaging technique that uses a low-coherence heterodyne interferometer is proposed. A double-grating frequency shifter was used in a tandem interferometer to provide the achromatic frequency shift for low-coherence light. A chopper, together with a processing circuit, was implemented to modulate the interference fringes. The surface profile was measured from the interference fringes taken by a CCD camera using a five-step method. The uncertainty in the displacement measurement is 0.34 µm for a displacement range of 43 µm. The surface profile of a glass sample with low effective reflectivity was acquired

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