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Implementation of line-scan dispersive interferometry for defect detection

Tang, Dawei, Gao, Feng and Jiang, Xiangqian (2016) Implementation of line-scan dispersive interferometry for defect detection. In: EUSPEN 16th International Conference & Exhibition, 30th May - 3rd June 2016, Nottingham, UK.

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Surface assurance is one of the main concerns for advanced manufacturing technologies such as Roll-to-Roll (R2R) technique. The undesired defects present on the barrier films make R2R products suffer from a low efficiency and short life span. In order to enhance the performance and the yield of the products, an inspection system enabling in-line metrology of functional surfaces in production lines is desirable to optimise the manufacturing processes. This paper reports an instantaneous line-scan dispersive interferometry which has sufficient resolutions and nano-scale measurement repeatability to detect defects on flexible PV films. Free from any mechanical scanning and obtaining a surface profile in a single shot allows this setup to minimise environmental effects and to be used on the shop floor. The captured spectral interferogram is analysed using a FFT based algorithm, and the process time can be accelerated through data parallelism using a graphics processing unit (GPU). The performance of the developed system was evaluated experimentally by measuring the polyethylene naphthalate (PEN) films provided by the Centre for Process Innovation (CPI). The experimental details and results are presented in this paper.

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Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: dispersive interferometry, defect detection, photovoltaic film, phase slope
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
School of Computing and Engineering
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References: [1] Elrawemi M, Blunt L, Fleming L and Sweeney F 2013 Surface Topography: Metrology and Properties 1(1) p.015006 [2] Rossi G and Nulman M 1993 J. Appl. Phys. 74(9) 5471-5475 [3] Shankar N G and Zhong Z W 2005 Microelectron. Eng. 77(3) 337-346 [4] Kumar N, Petrik P, Ramanandan G K, El Gawhary O, Roy S, Pereira S F, Coene W M and Urbach H P 2014 Opt. Express 22(20) 24678-88 [5] Kimbrough B 2015 SPIE Optical Engineering+ Applications International Society for Optics and Photonics [6] Tang D, Gao F and Jiang X 2014 Appl.Opt. 53(24) 5510-5516 [7] Rebeggiani S, Rosen B G and Sandberg A 2011 Journal of Physics Series National Physical Laboratory 311 35-39
Depositing User: Dawei Tang
Date Deposited: 24 Jun 2016 12:33
Last Modified: 28 Aug 2021 17:00


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