High resolution position measurement from dispersed reference interferometry using template matching

This paper describes a method to extract high resolution position
data from a dispersed reference interferometry (DRI) by applying a
template matching technique to the acquired spectral interferograms.
Calculation of the correlation coefficient between windowed spectral
interferograms acquired from the DRI apparatus and a set of numerically
calculated template interferograms allows the absolute determination of
position with nanometer resolution. Both the operating principle of the DRI
apparatus and implementation of the template matching method is
presented. Experimental validation of the method is provided through the
demonstration of position tracking and an assessment of linearity,
repeatability and noise performance