Blunt, Liam (2006) Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation. In: Micro and Nano Technology (MNT) Measurement Club, 1-day meeting, The Measurement and Characterisation of MST Devices (MEMS), Monday 27 February 2006, National Physical Laboratory, Hampton Road, Teddington, Middlesex TW11 0LW. (Unpublished)
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