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Evaluation of MEMS Structures with Directional Characteristics Based on FRAT and Lifting Wavelet

Lu, Wenlong, Yu, Nengguo, Zou, Xianglong, Liu, Xiaojun, Zhou, Liping and Li, Tukun (2015) Evaluation of MEMS Structures with Directional Characteristics Based on FRAT and Lifting Wavelet. Procedia CIRP, 27. pp. 298-302. ISSN 2212-8271

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Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (Micro-Electro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEMS structure. Secondly, on the basis of the directional characteristic obtained, the profiles of the MEMS structure are analyzed by lifting wavelet. Finally, Histogram-fitting is employed for areal evaluation of a MEMS structure. Simulated and experimental results show that MEMS structures with directional characteristic can be extracted and evaluated by the method effectively.

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Item Type: Article
Uncontrolled Keywords: Directional characteristic; Finite Radon Transform; Lifting wavelet; MEMS structure
Subjects: T Technology > TJ Mechanical engineering and machinery
Schools: School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
School of Computing and Engineering
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Depositing User: Tukun Li
Date Deposited: 07 May 2015 09:22
Last Modified: 28 Aug 2021 18:11


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